Integrated design of mycro-electro-mechanical systems
Résumé
This paper is a first attempt to qualify the design process in the field of micro-electro-mechanical systems products. Through this study we try to analyse how the issue of manufacturability is addressed. This requires an understanding of the specificities of the manufacturing process involved in the realization of these products (we focus on a process derived from the electronics industry). Then we look at the main design methodologies to understand how the manufacturing can be taken into account. Computer-aided tools associated to these methodologies are presented at the same time. Finally, we conclude on the need for specifications for the design methodology that would provide designers with greater independence from manufacturing constraints.
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