Guide d'onde Hybrid materials Multilayers Computational electromagnetic methods Radiofrequency magnetron sputtering Copper Crystal structure AFM Down-conversion Nanostructure High-k dielectrics Structural properties Raman MoS2 Silicon photonics Refractive index Couches minces semi-conductrices Silicon nanocrystals Si nanocluster Luminescence Citric acid Rare earths Nanostructures Epitaxy Thin film Cerium Friction Silicon nitride Terres rares Oxide interface Photoluminescence Electron paramagnetic resonance Films Laser pyrolysis Raman scattering Cathodoluminescence Waveguides Fluorescence PZT Thin films Oxide materials Irradiation Hillocks Oxygen vacancies RF magnetron sputtering GENOMIQUE Oxides Lifetime Nanoparticles Doping M-lines XRD Quantum-well Hafnium silicate Optical properties Phase transition Waveguide Al2O3 FTIR Pulvérisation magnétron radiofréquence Energy transfer CO adsorption Pulsed laser deposition Nanostructured materials Optical amplifiers Feature erasure IR spectroscopy Magnetron sputtering Nanostructuring Semiconductors Liposomes Microstructure physics ADE-FDTD Pulvérisation cathodique Grazing incidence X-ray diffraction Erbium Microstructure physique Infrared absorption HR STEM-HAADF CoMoS Matériaux hybrides Electroluminescence Si-rich silicon oxide Photovoltaic Sputtering Silicon nanoclusters Conductivity Rare-earth ions Silicium Reactive magnetron sputtering Atom probe tomography Neodymium Rare earth Couches minces Hafnium silicates Nanoparticules Terbium SiC Microstructure Silicon